Terahertz-Wave Detection Element, Manufacturing Method Therefor, and Observation Apparatus
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United States of America Patent
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Mar 23, 2015
filing date -
Sep 24, 2012
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Abstract
Provided a terahertz-wave detection element having high spatial resolution in which the occurrence of warping and a crack is suitably suppressed. The detection element includes: an electro-optic crystal layer in which a refractive index at an incident position of the terahertz wave changes in accordance with incident intensity of the terahertz wave; and a substrate supporting the electro-optic crystal layer. The detection element detects a spatial-characteristics distribution generated in probe light in superposition with the terahertz wave, thereby to detect the spatial intensity distribution of the incident terahertz wave. A joined part between the electro-optic crystal and the supporting substrate is an amorphous layer consisting of an oxide including a constituent element of the electro-optic crystal and the substrate, and also having a thickness of 1-50 nm. A thickness of the electro-optic crystal layer is 1-30 μm.
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