Terahertz-wave detection element, manufacturing method therefor, and observation apparatus
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United States of America Patent
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Feb 21, 2017
Grant Date -
Jul 9, 2015
app pub date -
Mar 23, 2015
filing date -
Sep 24, 2012
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Abstract
Provided a terahertz-wave detection element with high spatial resolution and suppressing a crack occurrence. A method of manufacturing the detection element capable of detecting a spatial intensity distribution of a terahertz wave includes: a step of forming an oxide layer on one main surface of a first substrate consisting of an electro-optic crystal; a step of joining the one main surface of the first substrate and a second substrate by an adhesive consisting; a step of thinning the first substrate of a joined body, to a thickness of 1-30 μm by polishing the first substrate; and a step of obtaining a large number of terahertz-wave detection elements by cutting the joined body. The oxide layer is formed such that the first substrate becomes convex to a side of the one main surface by causing a tensile stress to act on it.
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