Shielding structures between optical waveguides

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United States of America Patent

PATENT NO 10191213
APP PUB NO 20150192735A1
SERIAL NO

14151138

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Abstract

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Methods and structures for shielding optical waveguides are provided. A method includes forming a first optical waveguide core and forming a second optical waveguide core adjacent to the first optical waveguide core. The method also includes forming an insulator layer over the first optical waveguide core and the second optical waveguide core. The method further includes forming a shielding structure in the insulator layer between the first optical waveguide core and the second optical waveguide core.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ellis-Monaghan, John J Grand Isle, US 254 2534
Gambino, Jeffrey P Westford, US 531 7344
Jaffe, Mark D Shelburne, US 146 2262
Peterson, Kirk D Jericho, US 152 1144
Rankin, Jed H Richmond, US 208 4551

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