Showerhead electrode assembly in a capacitively coupled plasma processing apparatus

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United States of America Patent

PATENT NO 9245718
APP PUB NO 20150194291A1
SERIAL NO

14662702

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Abstract

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A showerhead electrode assembly for use in a capacitively coupled plasma processing apparatus comprising a heat transfer plate. The heat transfer plate having independently controllable gas volumes which may be pressurized to locally control thermal conductance between a heater member and a cooling member such that uniform temperatures may be established on a plasma exposed surface of the showerhead electrode assembly.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bise, Ryan Los Gatos, US 14 301
Dhindsa, Rajinder San Jose, US 250 10067
Nam, Sang Ki Danville, US 49 484

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