Producing method of encapsulating layer-covered semiconductor element and producing method of semiconductor device

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United States of America Patent

PATENT NO 9214362
APP PUB NO 20150194324A1
SERIAL NO

14412746

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Abstract

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A method for producing an encapsulating layer-covered semiconductor element includes a disposing step of disposing a semiconductor element on a support, an encapsulating step of embedding and encapsulating the semiconductor element by an encapsulating layer in an encapsulating sheet including a peeling layer and the encapsulating layer laminated below the peeling layer and made from a thermosetting resin before complete curing, and a heating step of heating and curing the encapsulating layer after the encapsulating step. The heating step includes a first heating step in which the encapsulating sheet is heated at a first temperature, while being mechanically pressurized toward the support and a second heating step in which the encapsulating sheet is heated at a second temperature that is higher than the first temperature after the first heating step.

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Patent Owner(s)

  • EPISTAR CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ebe, Yuki Osaka, JP 18 101
Mitani, Munehisa Osaka, JP 16 102
Ooyabu, Yasunari Osaka, JP 81 694

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