Crystal oscillator and the use thereof in semiconductor fabrication
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United States of America Patent
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May 15, 2018
Issued Date -
Jul 9, 2015
app pub date -
Jan 6, 2014
filing date -
Jan 6, 2014
priority date (Note) -
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Abstract
Systems and methods are provided for implementing a crystal oscillator to monitor and control semiconductor fabrication processes. More specifically, a method is provided for that includes performing at least one semiconductor fabrication process on a material of an integrated circuit (IC) disposed within a processing chamber. The method further includes monitoring by at least one electronic oscillator disposed within the processing chamber for the presence or absence of a predetermined substance generated by the at least one semiconductor fabrication process. The method further includes controlling the at least one semiconductor fabrication process based on the presence or absence of the predetermined substance detected by the at least one electronic oscillator.
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