POLISH APPARATUS AND POLISH METHOD

United States of America Patent

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Issued Date
Jul 16, 2015
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Jun 11, 2014
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Jan 10, 2014

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Abstract

A polish apparatus including a polish pad including a polish surface configured to contact a polish object; and a coolant injector configured to inject a coolant to the polish surface and cool the polish pad by a vaporization heat.

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TOSHIBA MEMORY CORPORATION	MINATO-KU TOKYO

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Inventor Name	Address	# of filed Patents	Total Citations
WATANABE, Takashi	Yokkaichi, JP	821	8789

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POLISH APPARATUS AND POLISH METHOD

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United States of America Patent

14301713

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14301713

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