IMPRINT APPARATUS AND IMPRINT METHOD
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United States of America Patent
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N/A
Issued Date -
Jul 16, 2015
app pub date -
Mar 7, 2014
filing date -
Jan 10, 2014
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
According to one embodiment, a guide plate is disposed around a periphery of the substrate holding unit, and is capable of moving in a direction orthogonal to a surface holding the substrate of the substrate holding unit. A controller is configured to control to cause the guide plate to move to a position where the template is not suffered from damage when the template is pressed to the substrate with a portion of the template extending outward from the substrate. A curing unit curies the imprint agent with the template being pressed to the substrate that the imprint agent is supplied thereon.
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