Importance

Loading Importance Indicators...

Abstract

Circuits, methods, and apparatus for testing pressure sensors and other integrated circuits and devices while applying a well-controlled pressure are provided. A fluid may be received by a flow controller. The flow controller may provide the fluid to a first branch of a Y-shaped nozzle. The fluid may be directed at a device-under-test by a second branch of the Y-shaped nozzle. A resulting backpressure may be measured by a pressure sensor at a third branch of the Y-shaped nozzle. A height controller may vary a height of the Y-shaped nozzle relative to the device-under-test based on the measured backpressure. Once a target backpressure is reached, the pressure sensor die or other integrated circuit may be tested. The device-under-test may be tested at zero pressure, at one or more different pressures, or combination thereof.

Loading the Abstract Image...

First Claim