AMPLIFICATION APPARATUS, ANTI-VIBRATION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Jul 16, 2015
app pub date -
Jan 9, 2015
filing date -
Jan 15, 2014
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Provided is an amplification apparatus that outputs an output signal corresponding to an input signal via an amplifier, and comprises a detector that is installed separately from a main body, which includes the amplifier, and is configured to detect the output signal outputted from the main body, and to feed back the output signal to the input signal.
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