Chemical liquid treatment apparatus and chemical liquid treatment method
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United States of America Patent
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Dec 18, 2018
Grant Date -
Jul 16, 2015
app pub date -
Aug 22, 2014
filing date -
Jan 16, 2014
priority date (Note) -
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Abstract
A chemical liquid treatment apparatus includes processing chambers; a chemical liquid feeding unit configured to cyclically feed a chemical liquid into the processing chambers; and a modifying unit. The modifying unit, when using a chemical liquid in which an effect thereof varies with a chemical liquid discharge time, is configured to calculate a variation of the effect of the chemical liquid based on the chemical liquid discharge time and is configured to modify the chemical liquid discharge time for each of the processing chambers based on the calculated variation of the effect of the chemical liquid and a cumulative time of the chemical liquid discharge time.
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