POLISHING PAD, POLISHING APPARATUS AND METHOD FOR MANUFACTURING POLISHING PAD

United States of America Patent

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Jan 15, 2015
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Jan 17, 2014

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Abstract

The present invention relates to a polishing pad comprising a buffer sheet containing a pressure distribution sheet. The invention also relates to a polishing apparatus and a method for manufacturing a polishing pad.

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SAN FANG CHEMICAL INDUSTRY CO LTD	KAOHSIUNG CITY

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Inventor Name	Address	# of filed Patents	Total Citations
FENG, CHUNG-CHIH	Kaohsiung City, TW	112	308
HUNG, YUNG-CHANG	Kaohsiung City, TW	45	119
LIU, WEI-TE	Kaohsiung City, TW	10	28
WANG, CHUN-TA	Kaohsiung City, TW	13	25
YAO, I-PENG	Kaohsiung City, TW	79	189

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POLISHING PAD, POLISHING APPARATUS AND METHOD FOR MANUFACTURING POLISHING PAD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

14597656

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14597656

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