Method of forming individual metallic microstructures

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United States of America Patent

PATENT NO 9334571
APP PUB NO 20150203969A1
SERIAL NO

14410893

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Abstract

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Methods for the formation of individual, precisely shaped nano- or micro-scale metallic structures, particularly pyramids. With this technique, mass fabrication of high-quality, uniform, and ultra-sharp pyramids, cones and wedges is achieved. The high yield, reproducibility, durability and massively parallel fabrication methods of this disclosure provide structures suitable for reliable optical sensing and detection and for cementing near-field optical imaging and spectroscopy as a routine characterization.

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Patent Owner(s)

  • REGENTS OF THE UNIVERSITY OF MINNESOTA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Johnson, Timothy W Shoreview, US 22 252
Oh, Sang-hyun Plymouth, US 35 541

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