DAMASCENE OXYGEN BARRIER AND HYDROGEN BARRIER FOR FERROELECTRIC RANDOM-ACCESS MEMORY
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United States of America Patent
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app pub date -
Sep 23, 2014
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Jan 20, 2014
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Abandoned
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Abstract
Disclosed herein is an apparatus that includes a ferrocapacitor disposed on a damascene barrier film. The damascene barrier film includes a hydrogen barrier region and an oxygen barrier region, with each being in contact with a bottom surface of the ferrocapacitor.
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