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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE	75016 PARIS
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES	PARIS FRANCE PARIS PARIS
UNIVERSITE CLAUDE BERNARD LYON 1	43 BOULEVARD DU 11 NOVEMBRE 1918 VILLEURBANNE 69100
CPE LYON FORMATION CONTINUE ET RECHERCHE	43 BOULEVARD DU ONZE NOVEMBRE 1918 VILLEURBANNE 69100

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
CADOT, Stéphane	Genay, FR	6	17
MARTIN, Francois	Grenoble, FR	51	242
QUADRELLI, Elsje	Lyon, FR	3	17
THIEULEUX, Chloé	Villeurbanne, FR	5	17

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jan 30, 2027

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2015/0211,112

Method of forming by ALD a thin film of formula MYx

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