Multi-zone temperature control for semiconductor wafer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10113233
APP PUB NO 20150211122A1
SERIAL NO

14680105

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An apparatus and a method for controlling critical dimension (CD) of a circuit is provided. An apparatus includes a controller for receiving CD measurements at respective locations in a circuit pattern in an etched film on a first substrate and a single wafer chamber for forming a second film of the film material on a second substrate. The single wafer chamber is responsive to a signal from the controller to locally adjust a thickness of the second film based on the measured CD's. A method provides for etching a circuit pattern of a film on a first substrate, measuring CD's of the circuit pattern, adjusting a single wafer chamber to form a second film on a second semiconductor substrate based on the measured CD. The second film thickness is locally adjusted based on the measured CD's.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Chun-Lin Jhubei, TW 49 165
Chern, Chyi Shyuan Taipei, TW 50 670
Fan, Ming-Yu PeiPu, TW 10 144
Lin, Jih-Jse Sijhih, TW 11 406
Mou, Jong-I Hsinpu Township, TW 55 412
Wang, Jo Fei Hsinchu, TW 24 171
Wei, Zin-Chang Hsin-Chu, TW 12 140
Wu, Hsin-Hsien Hsinchu, TW 59 325
Yang, Chi-Ming Hsian-San District, TW 171 1733
Yeh, Jun-Lin Taipei, TW 22 715

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Apr 30, 2026
11.5 Year Payment $7400.00 $3700.00 $1850.00 Apr 30, 2030
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00