METHODS AND APPARATUS TO DETERMINE WORKPIECE CONTAMINATION
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United States of America Patent
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app pub date -
Apr 9, 2015
filing date -
Oct 10, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Methods and apparatus to determine workpiece contamination are disclosed. One disclosed example apparatus includes a filter membrane to capture dirt particles from a characteristic volume, where the dirt particles are introduced to the liquid volume by subjecting the workpiece to the liquid volume. The example apparatus also includes a transporting device to move a portion of the filter membrane or a sensor relative to the portion. The example apparatus also includes an analysis computer to determine, based on the sensor, a dirt particle load of the liquid volume, where the dirt particle load is based on one or more of a type, a number, a size, or a size distribution of dirt particles accumulated on a section of the filter membrane.
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