LIGHTING DEVICE AND MICROSCOPE, AND LIGHTING METHOD AND OBSERVATION METHOD

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United States of America Patent

SERIAL NO

14683507

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Abstract

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An illumination apparatus including: a traveling wave forming unit that is disposed in an optical path of a light flux emitted from a light source unit and that is configured to form a sonic traveling wave in a direction traversing the emitted light flux; and an illumination optical system that is configured to form, on a plane to be observed, position-variable interference fringes caused by a plurality of diffracted light beams generated from the traveling wave forming unit.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION15-3 KONAN 2-CHOME MINATO-KU TOKYO 1086290

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DAKE, Fumihiro Kawasaki-shi, JP 12 22

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