Temperature controller for semiconductor wafer and temperature control method for semiconductor wafer
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United States of America Patent
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Oct 24, 2017
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app pub date -
Jan 9, 2015
filing date -
Jan 27, 2014
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Abstract
A temperature controller that performs a temperature control on a plurality of temperature adjusters including a reference temperature adjuster to adjust a temperature of a semiconductor wafer includes a setpoint setting section that: sets a temperature detected by a master temperature detector as a control setpoint for a reference one of the temperature adjusters of a master loop, until a temporary setpoint below an actual control setpoint preset as a desired temperature of the semiconductor wafer is reached; and sets the actual control setpoint as the control setpoint for the master loop after the temporary setpoint is reached.
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