Charged Particle Beam Apparatus
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United States of America Patent
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Issued Date -
Jul 30, 2015
app pub date -
Jul 1, 2013
filing date -
Sep 27, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The ordinary charged particle beam apparatus works on the assumption that signals are detected while its diaphragm and the sample are being positioned close to each other. This structure is not suitable for observing a sample with a prominently uneven surface in a gas atmosphere at atmospheric pressure or at a pressure substantially equal thereto. The present invention provides a charged particle beam apparatus that separates its charged particle optical tube from the space in which the sample is placed. The apparatus includes a detachable diaphragm that lets a primary charged particle beam permeate or pass therethrough. Installed in the space where the sample is placed is a detector that detects secondary particles discharged from the sample irradiated with the primary charged particle beam.
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