Electrostatically driven MEMS device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9670056
SERIAL NO

14607714

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Importance

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Abstract

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The MEMS device has a suspended mass supported via a pair of articulation arms by a supporting region. An electrostatic driving system, coupled to the articulation arms, has mobile electrodes and fixed electrodes that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies, arranged on opposite sides of a respective articulation arm and connected to the articulation arm through connection elements. Each actuation assembly extends laterally to the suspended mass and has an auxiliary arm carrying a respective plurality of mobile electrodes. Each auxiliary arm is parallel to the articulation arms. The connection elements may be rigid or formed by linkages.

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Patent Owner(s)

  • STMICROELECTRONICS S.R.L.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carminati, Roberto Piancogno, IT 65 106
Conti, Sebastiano Mistretta, IT 39 550

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