Stacked lateral overlap transducer (SLOT) based three-axis accelerometer
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United States of America Patent
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Feb 19, 2019
Grant Date -
Aug 6, 2015
app pub date -
Apr 13, 2015
filing date -
Apr 30, 2010
priority date (Note) -
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Abstract
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using accelerometers. Some such accelerometers include a substrate, a first plurality of electrodes, a second plurality of electrodes, a first anchor attached to the substrate, a frame and a proof mass. The substrate may extend substantially in a first plane. The proof mass may be attached to the frame, may extend substantially in a second plane and may be substantially constrained for motion along first and second axes. The frame may be attached to the first anchor, may extend substantially in a second plane and may be substantially constrained for motion along the second axis. A lateral movement of the proof mass in response to an applied lateral acceleration along the first or second axes may result in a change in capacitance at the first or second plurality of electrodes.
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