METHOD FOR MANUFACTURING VIBRATING ELEMENT, VIBRATING ELEMENT, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT
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United States of America Patent
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Issued Date -
Aug 6, 2015
app pub date -
Feb 3, 2015
filing date -
Feb 6, 2014
priority date (Note) -
Abandoned
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Abstract
A method for manufacturing a vibrating element includes: providing, on a substrate, a first protective layer and a second protective layer; disposing the substrate in an apparatus including an energy-beam emitting unit for dry etching; and etching, using an energy beam emitted from the energy-beam emitting unit, the substrate on which the first protective layer and the second protective layer are disposed on one side relative to an intersection point at which a center of the energy-beam emitting unit and the substrate intersect each other in a plan view of the substrate. When a distance between the intersection point and the first protective layer is shorter than a distance between the intersection point and the second protective layer, a width of the first protective layer in a direction intersecting the extending direction of the vibrating arm is made narrower than a width of the second protective layer.
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