Ball screw showerhead module adjuster assembly for showerhead module of semiconductor substrate processing apparatus
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United States of America Patent
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Mar 22, 2016
Grant Date -
Aug 13, 2015
app pub date -
Feb 11, 2014
filing date -
Feb 11, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A semiconductor substrate processing apparatus comprises a ball screw showerhead module adjuster assembly for adjusting the planarization of a showerhead module of the apparatus. The ball screw showerhead module adjuster assembly comprises a collar supported in a stepped opening of a top plate; a bellows forms an airtight seal between the collar and an adjuster plate supported above the collar by at least three adjustable ball screws operable to adjust the planarization of the adjuster plate with respect to the collar. An insulating sleeve extends through an opening in the collar, the bellows, and the adjuster plate. A stem of the showerhead module is supported in an opening of the insulating sleeve by a nut assembly such that the stem is supported and aligned within the insulating sleeve so that an adjustment of planarization of the adjuster plate thereby adjusts the planarization of the faceplate of the showerhead module.
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