Importance

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Abstract

In one embodiment, a sample processing apparatus includes a sample stage including electrodes on which a sample is to be placed, and a polarity setting module to set polarity of each electrode to first or second polarity. The apparatus further includes a beam generator to irradiate, with a beam, a portion of the sample placed on an electrode with the second polarity. The apparatus further includes a leading edge recognition module to recognize a leading edge of the sample, and a measuring module to measure a positional displacement between the leading edge and the electrode with the second polarity. The apparatus further includes a position changing module to change a relative position between the sample and the beam generator, based on the positional displacement measured by the measuring module, and a polarity changing module to change polarity of an electrode under the leading edge to the second polarity.

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First Claim