APPARATUS AND METHOD FOR ATOMIC FORCE MICROSCOPY

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United States of America Patent

APP PUB NO 20150226766A1
SERIAL NO

14412831

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Abstract

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An apparatus (100) for performing atomic force microscopy is disclosed. The apparatus comprises an AFM measurement unit (102) configured to operate in a first controlled atmosphere (300) and a pretreatment unit (101) configured to operate in a second controlled atmosphere (400), the second controlled atmosphere being different from the first controlled atmosphere. The pretreatment unit is connected to the AFM measurement unit. In one embodiment, the second controlled atmosphere is a vacuum atmosphere, whereas the first controlled atmosphere includes at least an inert gas.

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Patent Owner(s)

Patent OwnerAddress
BRUKER NANO INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117
IMEC3001 LEUVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Paredis, Kristof Leuven, BE 5 0
Vandervorst, Wilfried Leuven, BE 29 356

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