Substrate Transfer Robot and Substrate Processing Apparatus Using The Same
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United States of America Patent
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Issued Date -
Aug 13, 2015
app pub date -
Jan 29, 2015
filing date -
Feb 13, 2014
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Abstract
A substrate processing apparatus may include: a loadlock chamber in which a substrate transferred from the outside is disposed, and an internal state thereof is changed to a vacuum state and an atmospheric pressure state; a substrate processing module in which a process is performed on the substrate; a transfer chamber in which the substrate is transferred, the transfer chamber being disposed between the loadlock chamber and the substrate processing module; and a substrate transfer robot installed within the transfer chamber and transferring the substrate.
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