Electroless deposition of continuous platinum layer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9469902
APP PUB NO 20150232995A1
SERIAL NO

14182987

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method for providing an electroless plating of a platinum containing layer is provided. A Ti3+ stabilization solution is provided. A Pt4+ stabilization solution is provided. A flow from the Ti3+ stabilization solution is combined with a flow from the Pt4+ stabilization solution and water to provide a diluted mixture of the Ti3+ stabilization solution and the Pt4+ stabilization solution. A substrate is exposed to the diluted mixture of the Ti3+ stabilization solution and the Pt4+ stabilization solution.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dordi, Yezdi Palo Alto, US 117 2663
Jagminiene, Aldona Vilnius, LT 11 74
Joi, Aniruddha Fremont, US 19 17
Norkus, Eugenijus Vilnius, LT 14 83
Stankeviciene, Ina Vilnius, LT 9 24
Tamasauskaite-Tamasiunaite, Loreta Vilnius, LT 4 7
Zieliene, Albina Vilnius, LT 2 2

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Apr 18, 2024
11.5 Year Payment $7400.00 $3700.00 $1850.00 Apr 18, 2028
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00