Deflection measuring device and deflection measuring method

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United States of America Patent

PATENT NO 9459093
APP PUB NO 20150233706A1
SERIAL NO

14296638

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Abstract

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According to one embodiment, a deflection measuring device that irradiates an effective region of a pattern transfer plate on which a pattern is formed, with parallel lights from at least two directions, and detects interference fringes of the parallel lights reflected from the effective region.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Komine, Nobuhiro Nagoya, JP 42 97
Sato, Hidenori Yokohama, JP 111 1089

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