Resist placing method and resist placing program

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United States of America Patent

PATENT NO 9804503
APP PUB NO 20150234287A1
SERIAL NO

14305320

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Abstract

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According to one embodiment, a resist placing method sets first and second grating vectors of a drop grating on which to place a resist drop. At this time, the first and second grating vectors are set based on information about a grid, which is a minimum grating unit for which the resist drop can be dropped, such that the thickness of a resist film after imprinting is within a predetermined range. In this case, the first and second grating vectors are set to be in directions different from both first and second minimum grating vectors of the grid. Then, the resist drop is placed in the drop grating.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tanaka, Satoshi Kawasaki, JP 937 10050

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