SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK
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United States of America Patent
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app pub date -
May 5, 2015
filing date -
Aug 26, 2011
priority date (Note) -
Abandoned
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Abstract
A method is provided for treating a bipolar ESC having a front surface and a back surface, the front surface including an anodized layer. The method includes eliminating the anodized layer, disposing a new anodized layer onto the front surface, and treating the new anodized layer with water to seal the new anodized layer.
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