Semiconductor device and method of manufacturing the same

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United States of America Patent

PATENT NO 9490327
APP PUB NO 20150236099A1
SERIAL NO

14619595

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Abstract

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A semiconductor device according to an embodiment includes: a semiconductor substrate; an n-type SiC layer provided on one side of the semiconductor substrate; a p-type first SiC region provided in the n-type SiC layer; a metallic second SiC region provided in the p-type first SiC region, the second SiC region containing at least one element selected from the group of Mg, Ca, Sr, Ba, Sc, Y, La, and lanthanoid; a gate electrode; a gate insulating film provided between the gate electrode and the n-type SiC layer, the gate insulating film provided between the gate electrode and the first SiC region; a first electrode provided on the second SiC region; and a second electrode provided on a side of the semiconductor substrate opposite to the n-type SiC layer.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iijima, Ryosuke Setagaya, JP 92 214
Shimizu, Tatsuo Shinagawa, JP 285 2225
Shinohe, Takashi Yokosuka, JP 168 1543

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