LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
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United States of America Patent
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Feb 19, 2015
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Feb 20, 2014
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Abstract
A laser processing apparatus for radiating a laser beam to a member to be treated provided in an air environment to perform surface treatment. The member to be treated forms a structure extending in a vertical direction. The laser processing apparatus includes: a liquid supply mechanism that jets and supplies liquid to a surface of the member to be treated; a laser radiation mechanism that radiates the laser beam in pulses to the surface of the member to be treated via the liquid; and a cylindrical gas laminar flow nozzle disposed below the liquid supply mechanism and configured to jet a gas upward to form a gas flow surrounding the member to be treated around an axis direction thereof.
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