Method and system for analyzing particles in cold plasma

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United States of America Patent

PATENT NO 9506868
APP PUB NO 20150241357A1
SERIAL NO

14431727

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Abstract

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The invention relates to a method of analyzing particles, in particular particles of diameter less than 1 μm, the method comprising the following steps:

    firing laser shots into a cold plasma (45) at low pressure;using an optical spectrometer device (60) to acquire emission spectra of the light emitted by the plasma as a result of the laser shots, in such a manner that for each acquired spectrum, an acquisition period begins no later than 100 ns after firing the laser shot; andanalyzing the particles present in the plasma on the basis of the emission spectra.

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Patent Owner(s)

Patent OwnerAddress
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUEPARIS
UNIVERSITE D'ORLEANSORLEANS

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boufendi, Laïfa Saint Denis en Val, FR 2 0
Dutouquet, Christophe Senlis, FR 1 0
Frejafon, Emeric Villiers Sous Saint Leu, FR 1 0
Meyer, Laurent L'Isle Adam, FR 5 5
Wattieaux, Gaétan Vigoulet-Auzil, FR 1 0

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