METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE

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United States of America Patent

APP PUB NO 20150243764A1
SERIAL NO

14430337

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Abstract

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The present invention discloses a method for manufacturing a semiconductor structure, which comprises the following steps: a) providing an SOI substrate, a shallow trench is formed on the SOI substrate, with the defined area of the shallow trench corresponding to the active region; b) forming the heavily doped layer on the shallow trench sidewall close to the active region; c) filling the shallow trench to form the shallow trench isolation structure; d) forming the semiconductor device in the active region. In the present disclosure, PN junctions are formed in the source electrode and the body region of the SOI, to provide a discharge channel for the charge accumulated in the body region, to reduce the impact of the floating body effect, and to improve the reliability of the device.

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Patent Owner(s)

Patent OwnerAddress
INSTITUTE OF MICROELECTRONICS CHINESE ACADEMY OF SCIENCES100029 BEIJING CITY CHAOYANG DISTRICT BEITUCHENG WEST ROAD NO 3 CHINESE ACADEMY OF SCIENCES INSTITUTE OF MICROELECTRONICS MUNICIPAL DISTRICT BEIJING CITY 100029

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yin, Haizhou Poughkeepsie, US 241 2072
Zhu, Huilong Poughkeepsie, US 589 8348

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