POLISHING METHOD AND METHOD FOR PRODUCING ALLOY MATERIAL
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United States of America Patent
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Sep 10, 2015
app pub date -
Oct 1, 2013
filing date -
Oct 3, 2012
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Abstract
The polishing method polishes an alloy material using a polishing pad and a polishing composition supplied to the polishing pad. The polishing composition contains an abrasive of silica or alumina, and a surface temperature of the polishing pad at the end of polishing is 20° C. or below. The method for producing an alloy material comprises a polishing step of polishing an alloy material using a polishing pad and a polishing composition supplied to the polishing pad. The polishing composition contains an abrasive of silica or alumina, and a surface temperature of the polishing pad at the end of polishing is 20° C. or below.
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