APPARATUS AND METHODS FOR MANUFACTURING THIN-FILM SOLAR CELLS
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United States of America Patent
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Sep 10, 2015
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May 26, 2015
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Apr 15, 2008
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Abstract
Improved methods and apparatus for forming thin-film layers of semiconductor material absorber layers on a substrate web. According to the present teachings, a semiconductor layer may be formed in a multi-zone process whereby various layers are deposited sequentially onto a moving substrate web.
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