DIFFRACTION GRATING, LASER APPARATUS, AND MANUFACTURING METHOD FOR DIFFRACTION GRATING
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United States of America Patent
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Issued Date -
Sep 10, 2015
app pub date -
Mar 10, 2015
filing date -
Mar 10, 2014
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Abstract
This diffraction grating is a reflection-type diffraction grating that has a grating, the cross section of which is an asymmetrical triangular shape, and comprises a first layer formed on the cross section having the asymmetrical triangular shape and of which a material is a metal, for reflecting light; and a second layer formed on the first layer on a surface of a long side of the triangular shape and of which a material is a dielectric, wherein given that a refractive index of the dielectric of the second layer is “n”, the thickness of the second layer is 15.38×(n−1)−0.65 (nm) or below.
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