Linear Motor and Lithography Arrangement Including Linear Motor
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United States of America Patent
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N/A
Issued Date -
Sep 10, 2015
app pub date -
May 21, 2015
filing date -
Sep 9, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A lithographic apparatus including a uniformity correction system is disclosed. The lithographic apparatus comprises an illumination system configured to condition a beam of radiation. The illumination system comprises a uniformity correction system located at a plane configured to receive a substantially constant pupil when illuminated with the beam of radiation. The uniformity correction system includes fingers configured to be movable into and out of intersection with a radiation beam so as to correct an intensity of respective portions of the radiation beam. A linear motor actuator arrangement drives the fingers to their respective appropriate positions to compensate for non-uniform illumination. Control is provided by a control system that precisely manipulates carriers of the fingers.
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