Liquid-Metal Organic Compound Supply System
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United States of America Patent
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Sep 17, 2015
app pub date -
Jun 26, 2014
filing date -
Mar 17, 2014
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Abstract
Disclosed is a liquid-metal organic compound supply system which is applicable to a metal organic chemical vapor deposition (MOVCD) processing apparatus, including disposing a first bottle body in a thermostat, a second bottle body and a three-way valve in room temperature. Wherein a first connecting end of the three-way valve and a first outlet pipe of the first bottle body connect to the MOVCD processing apparatus, a second connecting end connects to a second inlet pipe of the second bottle body and a third connecting end connects to a first inlet pipe of the first bottle body and a second outlet pipe of the second bottle body. When the present invention is applied to the MOCVD manufacturing process, it prolongs usage period of trimethyl gallium, decreases replacement frequency and increases utilization ratio. Besides, the present invention also decreases the manufacturing and packing costs of trimethyl gallium.
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