Measuring apparatus and method of manufacturing article
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United States of America Patent
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Oct 24, 2017
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app pub date -
Mar 10, 2015
filing date -
Mar 13, 2014
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Abstract
The present invention provides a measuring apparatus for measuring a shape of an object to be measured, comprising an emitting unit configured to emit pattern light, an optical system configured to guide the pattern light emitted from the emitting unit to the object, a deflection unit arranged between the optical system and the object and configured to deflect the pattern light emitted from the optical system, an image sensing unit configured to capture the object via the optical system and the deflection unit, and a processing unit configured to determine the shape of the object based on an image of the object captured by the image sensing unit, wherein the deflection unit comprises a diffraction grating configured to diffract the pattern light emitted from the optical system.
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