Electrostatic chuck cleaner, cleaning method, and exposure apparatus
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United States of America Patent
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Mar 21, 2017
Grant Date -
Sep 17, 2015
app pub date -
Aug 22, 2014
filing date -
Mar 13, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
According to one embodiment, an electrostatic chuck cleaner cleaning an adsorption face of an electrostatic chuck capable of attracting a reticle, and the cleaner includes: a plurality of substrates; adhesive layers provided on a major surface of each of the substrates, the adhesive layers being pressed against the adsorption face; and conductive layers provided on the major surface of each of the substrates, and the conductive layers being provided in a region other than a region where the adhesive layer being provided. The adhesive layers provided on the major surface of each of the substrates are disposed in different regions, and the entire adsorption face is pressed by the adhesive layers when the adhesive layers of the substrates are pressed against the adsorption face.
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