MEMS DEVICE
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Sep 17, 2015
app pub date -
Sep 9, 2014
filing date -
Mar 13, 2014
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
According to one embodiment, a MEMS device includes a first variable capacitor including a first lower electrode fixed to a substrate, and a movable first upper electrode provided above the first lower electrode, a second variable capacitor including a second lower electrode fixed to the substrate, and a movable second upper electrode provided above the second lower electrode, and a connection part configured to electrically and mechanically connect the first upper electrode and the second upper electrode to each other.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully