Method and Apparatus for Generating Radiation

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United States of America Patent

APP PUB NO 20150264791A1
SERIAL NO

14418366

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method for generating radiation. Directing a first body from a first location. Directing a second body from a second, different location. The first body and second body being used to form a target at a plasma formation location. At least one of the first body and second body comprising a fuel for use in generating a radiation generating plasma. Directing initiating radiation at the target at the plasma formation location to generate a radiation generating plasma from the target.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VVELDHOVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dijksman, Frederik Weert, NL 1 9
Nikipelov, Andrey Eindhoven, NL 26 35
Yakunin, Mikhailovich Mierlo, NL 1 9

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