Pressure sensor
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United States of America Patent
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Aug 23, 2016
Issued Date -
N/A
app pub date -
Dec 29, 2014
filing date -
Mar 20, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
According to one embodiment, a pressure sensor includes: a support section; a film section; and a strain sensing element. The film section is supported by the support section and deformable. The film section includes a first film and a second film. The first film includes a first region located in a central part and a second region located in a peripheral part around the first region. The second film is provided on the first region. The strain sensing element is provided on part of the second region. The strain sensing element includes a first magnetic layer; a second magnetic layer; and an intermediate layer. Magnetization of the first magnetic layer changes in response to deformation of the second region. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.
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