Manufacturing apparatus control system and manufacturing apparatus control method

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United States of America Patent

PATENT NO 9836045
SERIAL NO

14478204

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Abstract

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According to one embodiment, a manufacturing apparatus control system includes a defect rate detector, a significant difference tester and a defect determining unit. The defect rate detector extracts a first apparatus passage history having a first defect rate. The defect rate detector detects a third defect rate by excluding a second apparatus passage history having a second defect rate from the first apparatus passage history. The significant difference tester calculates a significant difference test value. The defect determining unit extracts a third apparatus passage history based on the third defect rate and the significant difference test value.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Magara, Takashi Meguro, JP 14 264

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