Sputter neutral particle mass spectrometry apparatus
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United States of America Patent
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Mar 29, 2016
Grant Date -
Sep 24, 2015
app pub date -
Mar 6, 2015
filing date -
Mar 18, 2014
priority date (Note) -
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Abstract
A sputter neutral particle mass spectrometry apparatus includes a sample table holding a sample which is a mass spectrometry target, and comprising a temperature control mechanism for the sample, an ion beam irradiation device which irradiates an ion beam on the sample to generate neutral particles, a laser irradiation device which irradiates the neutral particles with a laser to obtain photoexcited ions, a mass spectrometer which draws in the drawn out photoexcited ions and performs mass analysis, a driving system mirror which is provided retractably on a laser light path between the laser irradiation device and the sample table, and reflects the laser when positioned within the laser light path, and, a profiler which is arranged in a reflective direction of the driving system mirror and detects a feature of the laser.
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