Electronic device having thin film transistor using organic semiconductor and method of manufacturing the same
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United States of America Patent
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Oct 11, 2016
Grant Date -
Sep 24, 2015
app pub date -
Mar 16, 2015
filing date -
Mar 19, 2014
priority date (Note) -
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Abstract
According to one embodiment, there is provided a manufacturing method of an electronic device including a lower electrode, a source electrode and a drain electrode made of a nanoparticulate conductive material on a substrate, an organic semiconductor layer between the source and drain electrodes, and a gate electrode on the organic semiconductor layer via a gate insulating layer. The manufacturing method includes forming a nonphotosensitive resin layer as the gate insulating layer on the organic semiconductor layer and on the lower electrode, forming a photosensitive resin layer as the gate insulating layer on the nonphotosensitive resin layer, and forming a through hole in the photosensitive resin layer on the lower electrode.
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