Resonator element, gyro sensor element, electronic device, electronic apparatus, and moving object

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9534894
APP PUB NO 20150270825A1
SERIAL NO

14644770

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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In order to provide a resonator element having high production efficiency and low impedance in a small size, the resonator element includes a base portion, and a driving arm which extends from the base portion and includes a through hole, in which the driving arm vibrates along an in-plane direction, and includes a plurality of broad portions of which a width in the in-plane direction is broad and a plurality of narrow portions of which a width in the in-plane direction is narrow which alternate with each other, and the through hole is disposed in the broad portion.

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First Claim

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Fumio Suwa, JP 28 274

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