Purification system with manifold assembly and removable filter cassette
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United States of America Patent
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Oct 18, 2016
Issued Date -
N/A
app pub date -
Sep 30, 2013
filing date -
Oct 1, 2012
priority date (Note) -
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Abstract
The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.
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